Abstract
We present a novel approach for highly sensitive and resolution-enhanced detection and monitoring of minute current variations using a single clamped-clamped microbeam resonator. The resonator's stiffness perturbations induced by the input current variation result in a frequency shift. The proposed resonant electric sensor operates close to the buckling region, revealing drastic changes in the deflection profile, which can be exploited for sensitive and high-resolution ammeter applications. We establish and verify the detailed sensitivity enhancement induced by the buckling effects with experimental results. The proposed resonant electric sensor exhibits an enhanced sensitivity of 85Hz/μA, requires a small area, and has a compact structure suitable for portable electronics.
| Original language | English (US) |
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| Title of host publication | 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 1715-1718 |
| Number of pages | 4 |
| ISBN (Electronic) | 9784886864352 |
| State | Published - 2023 |
| Event | 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan Duration: Jun 25 2023 → Jun 29 2023 |
Publication series
| Name | 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 |
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Conference
| Conference | 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 |
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| Country/Territory | Japan |
| City | Kyoto |
| Period | 06/25/23 → 06/29/23 |
Bibliographical note
Publisher Copyright:© 2023 IEEJ.
Keywords
- Buckling effects
- Electrothermal modulation
- Resonant electric sensor
- Sensitivity enhancement
ASJC Scopus subject areas
- Computer Science Applications
- Electrical and Electronic Engineering
- Control and Optimization
- Instrumentation