A general approach to semimetallic, ultra-high-resolution, electron-beam resists

Bao Yu Zong^*, Gu Chang Han, Yuan Kai Zheng, Li Hua An, Tie Liu, Ke Bin Li, Jin Jun Qiu, Zai Bing Guo, Ping Luo, Hao Min Wang, Bo Liu

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review