A general approach to semimetallic, ultra-high-resolution, electron-beam resists

Bao Yu Zong*, Gu Chang Han, Yuan Kai Zheng, Li Hua An, Tie Liu, Ke Bin Li, Jin Jun Qiu, Zaibing Guo, Ping Luo, Hao Min Wang, Bo Liu

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    7 Scopus citations

    Fingerprint

    Dive into the research topics of 'A general approach to semimetallic, ultra-high-resolution, electron-beam resists'. Together they form a unique fingerprint.

    Material Science