A general approach to semimetallic, ultra-high-resolution, electron-beam resists

Bao Yu Zong*, Gu Chang Han, Yuan Kai Zheng, Li Hua An, Tie Liu, Ke Bin Li, Jin Jun Qiu, Zaibing Guo, Ping Luo, Hao Min Wang, Bo Liu

*Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

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