A Compact Reconfigurable Resonator-Based Direct Current Sensing System

xuecui zou, Usman Yaqoob, Hussein Hussein, Khaled N. Salama, Hossein Fariborzi

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


A compact and reconfigurable current readout system is presented that is based on microelectromechanical system (MEMS) resonators. The proposed system generates analog and digital outputs by electrothermally tuning the microbeam resonant frequency according to variations in the input current signal. A single resonator is utilized to generate the analog output, while a resonator array operating at different frequencies is utilized to generate a digital one-hot output. Experiments showed that the frequency shift is linearly proportional to the square of the current. The single resonator has a detection limit of 1.16 μ A, and the resonator array offers good static linearity with a maximum differential/integral non-linearity of 0.55/0.23 least significant bits. The single resonator is suitable for applications requiring high-resolution measurements. The proposed resonator sensing system has a small footprint, is compatible with large-scale integration, and provides considerable flexibility for reconfiguration.
Original languageEnglish (US)
Pages (from-to)1-9
Number of pages9
JournalJournal of Microelectromechanical Systems
StatePublished - Nov 7 2022

Bibliographical note

KAUST Repository Item: Exported on 2022-11-14

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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