A Compact Reconfigurable Resonator-Based Direct Current Sensing System

xuecui zou; Usman Yaqoob; Hussein Hussein; Khaled N. Salama; Hossein Fariborzi

doi:10.1109/jmems.2022.3216912

A Compact Reconfigurable Resonator-Based Direct Current Sensing System

xuecui zou, Usman Yaqoob, Hussein Hussein, Khaled N. Salama, Hossein Fariborzi

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A compact and reconfigurable current readout system is presented that is based on microelectromechanical system (MEMS) resonators. The proposed system generates analog and digital outputs by electrothermally tuning the microbeam resonant frequency according to variations in the input current signal. A single resonator is utilized to generate the analog output, while a resonator array operating at different frequencies is utilized to generate a digital one-hot output. Experiments showed that the frequency shift is linearly proportional to the square of the current. The single resonator has a detection limit of 1.16 μ A, and the resonator array offers good static linearity with a maximum differential/integral non-linearity of 0.55/0.23 least significant bits. The single resonator is suitable for applications requiring high-resolution measurements. The proposed resonator sensing system has a small footprint, is compatible with large-scale integration, and provides considerable flexibility for reconfiguration.

Original language	English (US)
Pages (from-to)	1-9
Number of pages	9
Journal	Journal of Microelectromechanical Systems
DOIs	https://doi.org/10.1109/jmems.2022.3216912
State	Published - Nov 7 2022

Bibliographical note

KAUST Repository Item: Exported on 2022-11-14

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/jmems.2022.3216912

Cite this

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title = "A Compact Reconfigurable Resonator-Based Direct Current Sensing System",

abstract = "A compact and reconfigurable current readout system is presented that is based on microelectromechanical system (MEMS) resonators. The proposed system generates analog and digital outputs by electrothermally tuning the microbeam resonant frequency according to variations in the input current signal. A single resonator is utilized to generate the analog output, while a resonator array operating at different frequencies is utilized to generate a digital one-hot output. Experiments showed that the frequency shift is linearly proportional to the square of the current. The single resonator has a detection limit of 1.16 μ A, and the resonator array offers good static linearity with a maximum differential/integral non-linearity of 0.55/0.23 least significant bits. The single resonator is suitable for applications requiring high-resolution measurements. The proposed resonator sensing system has a small footprint, is compatible with large-scale integration, and provides considerable flexibility for reconfiguration.",

author = "xuecui zou and Usman Yaqoob and Hussein Hussein and Salama, {Khaled N.} and Hossein Fariborzi",

note = "KAUST Repository Item: Exported on 2022-11-14",

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doi = "10.1109/jmems.2022.3216912",

language = "English (US)",

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T1 - A Compact Reconfigurable Resonator-Based Direct Current Sensing System

AU - zou, xuecui

AU - Yaqoob, Usman

AU - Hussein, Hussein

AU - Salama, Khaled N.

AU - Fariborzi, Hossein

N1 - KAUST Repository Item: Exported on 2022-11-14

PY - 2022/11/7

Y1 - 2022/11/7

N2 - A compact and reconfigurable current readout system is presented that is based on microelectromechanical system (MEMS) resonators. The proposed system generates analog and digital outputs by electrothermally tuning the microbeam resonant frequency according to variations in the input current signal. A single resonator is utilized to generate the analog output, while a resonator array operating at different frequencies is utilized to generate a digital one-hot output. Experiments showed that the frequency shift is linearly proportional to the square of the current. The single resonator has a detection limit of 1.16 μ A, and the resonator array offers good static linearity with a maximum differential/integral non-linearity of 0.55/0.23 least significant bits. The single resonator is suitable for applications requiring high-resolution measurements. The proposed resonator sensing system has a small footprint, is compatible with large-scale integration, and provides considerable flexibility for reconfiguration.

AB - A compact and reconfigurable current readout system is presented that is based on microelectromechanical system (MEMS) resonators. The proposed system generates analog and digital outputs by electrothermally tuning the microbeam resonant frequency according to variations in the input current signal. A single resonator is utilized to generate the analog output, while a resonator array operating at different frequencies is utilized to generate a digital one-hot output. Experiments showed that the frequency shift is linearly proportional to the square of the current. The single resonator has a detection limit of 1.16 μ A, and the resonator array offers good static linearity with a maximum differential/integral non-linearity of 0.55/0.23 least significant bits. The single resonator is suitable for applications requiring high-resolution measurements. The proposed resonator sensing system has a small footprint, is compatible with large-scale integration, and provides considerable flexibility for reconfiguration.

UR - http://hdl.handle.net/10754/685646

UR - https://ieeexplore.ieee.org/document/9940469/

U2 - 10.1109/jmems.2022.3216912

DO - 10.1109/jmems.2022.3216912

M3 - Article

SN - 1057-7157

SP - 1

EP - 9

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

ER -

A Compact Reconfigurable Resonator-Based Direct Current Sensing System

Abstract

Bibliographical note

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