In this paper, the design and experimental results of a compact microelectromechanical (MEM) resonator-based analog to digital converter (ADC) are presented. The proposed N-bit ADC design produces the output bits using only N resonators. In addition, the device is designed in a symmetric way to cancel the feedthrough signal using a differential amplifier. While the measured ADC's sampling rate is 58 S/s, consuming 3.897pJ/conversion step, we show that by down-scaling the resonator's dimensions, MHz sampling rates and femto-joules energy consumption per conversion step are attainable, making resonator-based ADCs an attractive contender for medium-speed ultra-low power applications.
|Original language||English (US)|
|Title of host publication||2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)|
|State||Published - 2021|