TY - GEN
T1 - A Compact High-Sensitivity Temperature Sensor using an Encapsulated Clamped-Clamped Mems Beam Resonator
AU - Zou, Xuecui
AU - Ahmed, Sally
AU - Jaber, Nizar
AU - Fariborzi, Hossein
N1 - KAUST Repository Item: Exported on 2021-08-10
PY - 2021
Y1 - 2021
N2 - In this paper, the design and experimental results of a resonator-based temperature sensor are presented. The sensor consists of an electrostatically-actuated clamped-clamped microbeam resonator. The device is fabricated using XMB10 industrial process and is encapsulated under low pressure. The resonance frequency and the output amplitude of the resonator are measured under different temperatures. Conventionally, coupled resonators are utilized to achieve high temperature coefficient of frequency (TCf). Here, we show a high TCf of -325 ppm/°C and a resolution of 0.023 °C using a clamped-clamped resonator. Also, the resonator consumes 6.8 pico-joules, which makes it an attractive candidate for low-energy applications.
AB - In this paper, the design and experimental results of a resonator-based temperature sensor are presented. The sensor consists of an electrostatically-actuated clamped-clamped microbeam resonator. The device is fabricated using XMB10 industrial process and is encapsulated under low pressure. The resonance frequency and the output amplitude of the resonator are measured under different temperatures. Conventionally, coupled resonators are utilized to achieve high temperature coefficient of frequency (TCf). Here, we show a high TCf of -325 ppm/°C and a resolution of 0.023 °C using a clamped-clamped resonator. Also, the resonator consumes 6.8 pico-joules, which makes it an attractive candidate for low-energy applications.
UR - http://hdl.handle.net/10754/670501
UR - https://ieeexplore.ieee.org/document/9495651/
U2 - 10.1109/Transducers50396.2021.9495651
DO - 10.1109/Transducers50396.2021.9495651
M3 - Conference contribution
SN - 978-1-6654-4845-1
BT - 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
PB - IEEE
ER -