A combined ElectroWetting on Dielectrics superhydrophobic platform based on silicon micro-structured pillars

Angelo Accardo; Francesco Gentile; Maria Laura Coluccio; Federico Mecarini; Francesco De Angelis; Enzo Di Fabrizio

doi:10.1016/j.mee.2012.07.028

A combined ElectroWetting on Dielectrics superhydrophobic platform based on silicon micro-structured pillars

Angelo Accardo^*, Francesco Gentile, Maria Laura Coluccio, Federico Mecarini, Francesco De Angelis, Enzo Di Fabrizio

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A simple and ready to use approach for combining silicon superhydrophobic surfaces with ElectroWetting On Dielectrics (EWOD) phenomenon is presented. The substrate is fabricated using a two-phases process, where a first optical lithography step is used to define the position of the micro-pillars and a second one exploits the characteristics of reactive ion etch Bosch technique. The fabricated substrate has been then coupled with a micro-manipulator tip to show the local changes mechanism of contact angle by applying very low DC voltages in the range from 5 to 30 V. The device can be of interest for a wide variety of microfluidics applications related to the biomedical field.

Original language	English (US)
Pages (from-to)	651-654
Number of pages	4
Journal	Microelectronic Engineering
Volume	98
DOIs	https://doi.org/10.1016/j.mee.2012.07.028
State	Published - Oct 2012
Externally published	Yes

Keywords

EWOD
Micromanipulator
Micropillars
Silicon
Superhydrophobicity

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Access to Document

10.1016/j.mee.2012.07.028

Cite this

@article{362dfea9fce94ada8694c3e6e4622fef,

title = "A combined ElectroWetting on Dielectrics superhydrophobic platform based on silicon micro-structured pillars",

abstract = "A simple and ready to use approach for combining silicon superhydrophobic surfaces with ElectroWetting On Dielectrics (EWOD) phenomenon is presented. The substrate is fabricated using a two-phases process, where a first optical lithography step is used to define the position of the micro-pillars and a second one exploits the characteristics of reactive ion etch Bosch technique. The fabricated substrate has been then coupled with a micro-manipulator tip to show the local changes mechanism of contact angle by applying very low DC voltages in the range from 5 to 30 V. The device can be of interest for a wide variety of microfluidics applications related to the biomedical field.",

keywords = "EWOD, Micromanipulator, Micropillars, Silicon, Superhydrophobicity",

author = "Angelo Accardo and Francesco Gentile and Coluccio, {Maria Laura} and Federico Mecarini and {De Angelis}, Francesco and {Di Fabrizio}, Enzo",

year = "2012",

month = oct,

doi = "10.1016/j.mee.2012.07.028",

language = "English (US)",

volume = "98",

pages = "651--654",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "ELSEVIER SCIENCE BV",

}

TY - JOUR

T1 - A combined ElectroWetting on Dielectrics superhydrophobic platform based on silicon micro-structured pillars

AU - Accardo, Angelo

AU - Gentile, Francesco

AU - Coluccio, Maria Laura

AU - Mecarini, Federico

AU - De Angelis, Francesco

AU - Di Fabrizio, Enzo

PY - 2012/10

Y1 - 2012/10

N2 - A simple and ready to use approach for combining silicon superhydrophobic surfaces with ElectroWetting On Dielectrics (EWOD) phenomenon is presented. The substrate is fabricated using a two-phases process, where a first optical lithography step is used to define the position of the micro-pillars and a second one exploits the characteristics of reactive ion etch Bosch technique. The fabricated substrate has been then coupled with a micro-manipulator tip to show the local changes mechanism of contact angle by applying very low DC voltages in the range from 5 to 30 V. The device can be of interest for a wide variety of microfluidics applications related to the biomedical field.

AB - A simple and ready to use approach for combining silicon superhydrophobic surfaces with ElectroWetting On Dielectrics (EWOD) phenomenon is presented. The substrate is fabricated using a two-phases process, where a first optical lithography step is used to define the position of the micro-pillars and a second one exploits the characteristics of reactive ion etch Bosch technique. The fabricated substrate has been then coupled with a micro-manipulator tip to show the local changes mechanism of contact angle by applying very low DC voltages in the range from 5 to 30 V. The device can be of interest for a wide variety of microfluidics applications related to the biomedical field.

KW - EWOD

KW - Micromanipulator

KW - Micropillars

KW - Silicon

KW - Superhydrophobicity

UR - http://www.scopus.com/inward/record.url?scp=84865589246&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2012.07.028

DO - 10.1016/j.mee.2012.07.028

M3 - Article

AN - SCOPUS:84865589246

SN - 0167-9317

VL - 98

SP - 651

EP - 654

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

A combined ElectroWetting on Dielectrics superhydrophobic platform based on silicon micro-structured pillars

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this