A biaxial micromirror for angular and depth scanning in optical coherence tomography (OCT)

U. Izhar; B. S. Ooi; S. Tatic-Lucic

doi:10.31438/trf.hh2010.61

A biaxial micromirror for angular and depth scanning in optical coherence tomography (OCT)

U. Izhar^*, B. S. Ooi, S. Tatic-Lucic

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

A novel gimbal-less, thermally actuated micromirror is developed which can be used as both a reference and scanning mirror in optical coherence tomography (OCT) applications. Maximum deflection angle of up to 28° has been achieved at 12mW in scanning mode. A vertical displacement of 116µm at 12mW (78±4°C) was observed in piston mode. Our design goal for this mirror is to undergo 5° angle. This deflection was accomplished at a temperature increase of 17±5°C with respect to ambient. Our device can be integrated with GaAs optics due to this moderate temperature increase during its operation.

Original language	English (US)
Title of host publication	2010 Solid-State Sensors, Actuators, and Microsystems Workshop
Editors	David J. Monk, Kimberly L. Turner
Publisher	Transducer Research Foundation
Pages	230-233
Number of pages	4
ISBN (Electronic)	0964002485, 9780964002487
DOIs	https://doi.org/10.31438/trf.hh2010.61
State	Published - 2010
Event	2010 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States Duration: Jun 6 2010 → Jun 10 2010

Publication series

Name	Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference	2010 Solid-State Sensors, Actuators, and Microsystems Workshop
Country/Territory	United States
City	Hilton Head Island
Period	06/6/10 → 06/10/10

Bibliographical note

Publisher Copyright:
© 2010TRF.

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering
Hardware and Architecture

Access to Document

10.31438/trf.hh2010.61

Cite this

Izhar, U., Ooi, B. S., & Tatic-Lucic, S. (2010). A biaxial micromirror for angular and depth scanning in optical coherence tomography (OCT). In D. J. Monk, & K. L. Turner (Eds.), 2010 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 230-233). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2010.61

Izhar, U. ; Ooi, B. S. ; Tatic-Lucic, S. / A biaxial micromirror for angular and depth scanning in optical coherence tomography (OCT). 2010 Solid-State Sensors, Actuators, and Microsystems Workshop. editor / David J. Monk ; Kimberly L. Turner. Transducer Research Foundation, 2010. pp. 230-233 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

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title = "A biaxial micromirror for angular and depth scanning in optical coherence tomography (OCT)",

abstract = "A novel gimbal-less, thermally actuated micromirror is developed which can be used as both a reference and scanning mirror in optical coherence tomography (OCT) applications. Maximum deflection angle of up to 28° has been achieved at 12mW in scanning mode. A vertical displacement of 116µm at 12mW (78±4°C) was observed in piston mode. Our design goal for this mirror is to undergo 5° angle. This deflection was accomplished at a temperature increase of 17±5°C with respect to ambient. Our device can be integrated with GaAs optics due to this moderate temperature increase during its operation.",

author = "U. Izhar and Ooi, {B. S.} and S. Tatic-Lucic",

note = "Publisher Copyright: {\textcopyright} 2010TRF.; 2010 Solid-State Sensors, Actuators, and Microsystems Workshop ; Conference date: 06-06-2010 Through 10-06-2010",

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doi = "10.31438/trf.hh2010.61",

language = "English (US)",

series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",

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Izhar, U, Ooi, BS & Tatic-Lucic, S 2010, A biaxial micromirror for angular and depth scanning in optical coherence tomography (OCT). in DJ Monk & KL Turner (eds), 2010 Solid-State Sensors, Actuators, and Microsystems Workshop. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, Transducer Research Foundation, pp. 230-233, 2010 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, United States, 06/6/10. https://doi.org/10.31438/trf.hh2010.61

A biaxial micromirror for angular and depth scanning in optical coherence tomography (OCT). / Izhar, U.; Ooi, B. S.; Tatic-Lucic, S.
2010 Solid-State Sensors, Actuators, and Microsystems Workshop. ed. / David J. Monk; Kimberly L. Turner. Transducer Research Foundation, 2010. p. 230-233 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Ooi, B. S.

AU - Tatic-Lucic, S.

PY - 2010

Y1 - 2010

N2 - A novel gimbal-less, thermally actuated micromirror is developed which can be used as both a reference and scanning mirror in optical coherence tomography (OCT) applications. Maximum deflection angle of up to 28° has been achieved at 12mW in scanning mode. A vertical displacement of 116µm at 12mW (78±4°C) was observed in piston mode. Our design goal for this mirror is to undergo 5° angle. This deflection was accomplished at a temperature increase of 17±5°C with respect to ambient. Our device can be integrated with GaAs optics due to this moderate temperature increase during its operation.

AB - A novel gimbal-less, thermally actuated micromirror is developed which can be used as both a reference and scanning mirror in optical coherence tomography (OCT) applications. Maximum deflection angle of up to 28° has been achieved at 12mW in scanning mode. A vertical displacement of 116µm at 12mW (78±4°C) was observed in piston mode. Our design goal for this mirror is to undergo 5° angle. This deflection was accomplished at a temperature increase of 17±5°C with respect to ambient. Our device can be integrated with GaAs optics due to this moderate temperature increase during its operation.

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U2 - 10.31438/trf.hh2010.61

DO - 10.31438/trf.hh2010.61

M3 - Conference contribution

AN - SCOPUS:79953771750

T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

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EP - 233

BT - 2010 Solid-State Sensors, Actuators, and Microsystems Workshop

A2 - Monk, David J.

A2 - Turner, Kimberly L.

PB - Transducer Research Foundation

T2 - 2010 Solid-State Sensors, Actuators, and Microsystems Workshop

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Izhar U, Ooi BS, Tatic-Lucic S. A biaxial micromirror for angular and depth scanning in optical coherence tomography (OCT). In Monk DJ, Turner KL, editors, 2010 Solid-State Sensors, Actuators, and Microsystems Workshop. Transducer Research Foundation. 2010. p. 230-233. (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). doi: 10.31438/trf.hh2010.61

A biaxial micromirror for angular and depth scanning in optical coherence tomography (OCT)

Abstract

Publication series

Conference

Bibliographical note

ASJC Scopus subject areas

Access to Document

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