Abstract
In this study, a cantilever-based pressure sensor is fabricated that moves within a cylinder cavity by using a fused deposition modeling (FDM)-based three-dimensional (3D) printer. The semi-enclosed cylinder cavity frame is generated through layer-by-layer additive manufacturing to release the suspended cantilever structure by the FDM-type 3D printer. The displacement of the sensing membrane induced by the pressure difference on both sides of the membrane results in capacitance variations, which can be read out electrostatically. Furthermore, the results also highlight the simplicity and cost-effectiveness of the manufacturing process for this portable pressure sensor.
| Original language | English (US) |
|---|---|
| Title of host publication | IEEE Electron Devices Technology and Manufacturing Conference |
| Subtitle of host publication | Strengthening the Globalization in Semiconductors, EDTM 2024 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9798350371529 |
| DOIs | |
| State | Published - 2024 |
| Event | 8th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2024 - Bangalore, India Duration: Mar 3 2024 → Mar 6 2024 |
Publication series
| Name | IEEE Electron Devices Technology and Manufacturing Conference: Strengthening the Globalization in Semiconductors, EDTM 2024 |
|---|
Conference
| Conference | 8th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2024 |
|---|---|
| Country/Territory | India |
| City | Bangalore |
| Period | 03/3/24 → 03/6/24 |
Bibliographical note
Publisher Copyright:© 2024 IEEE.
Keywords
- 3D-printing
- Differential sensing
- electrostatic
- Pressure sensor
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Energy Engineering and Power Technology
- Electrical and Electronic Engineering
- Instrumentation