65NM yield detractor caused by M1 filament shorts and solution

Y. C. Ee, S. K. Tan, C. S. Chee, J. B. Tan, B. C. Zhang, Y. K. Siew, P. K. Tan, F. Zhang, K. H. Lai, M. S. Chettiar, Xianbin Wang, Thomas Fu, L. C. Hsia, A. Inani, N. Akiya, L. Yuan, A. Agarwal

    Research output: Contribution to conference › Paper › peer-review

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