∼3-nm ZnO nanoislands deposition and application in charge trapping memory grown by single ALD step

Nazek El-Atab, Farsad Chowdhury, Turkan Gamze Ulusoy, Amir Ghobadi, Amin Nazirzadeh, Ali K. Okyay, Ammar Nayfeh*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

20 Scopus citations


Low-dimensional semiconductor nanostructures are of great interest in high performance electronic and photonic devices. ZnO is considered to be a multifunctional material due to its unique properties with potential in various applications. In this work, 3-nm ZnO nanoislands are deposited by Atomic Layer Deposition (ALD) and the electronic properties are characterized by UV-Vis-NIR Spectrophotometer and X-ray Photoelectron Spectroscopy. The results show that the nanostructures show quantum confinement effects in 1D. Moreover, Metal-Oxide-Semiconductor Capacitor (MOSCAP) charge trapping memory devices with ZnO nanoislands charge storage layer are fabricated by a single ALD step and their performances are analyzed. The devices showed a large memory window at low operating voltages with excellent retention and endurance characteristics due to the additional oxygen vacancies in the nanoislands and the deep barrier for the trapped holes due to the reduction in ZnO electron affinity. The results show that the ZnO nanoislands are promising in future low power memory applications.

Original languageEnglish (US)
Article number38712
JournalScientific Reports
StatePublished - Dec 19 2016

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Publisher Copyright:
© The Author(s) 2016.

ASJC Scopus subject areas

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