3-D Printed Biocompatible Micro-Bellows Membranes

Khalil Moussi, Jurgen Kosel*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Scopus citations


Bellows membranes are essential elements in many actuator devices. Currently, the size, shape, and dimensions of bellows membranes are limited by the fabrication process constraints. Miniaturizing the bellows membranes is a prerequisite for the development of integrated systems with novel capabilities as needed, for example, in advanced biomedical devices. Using a two-photon polymerization, 3-D printing technique, we present a high-resolution, high-yield, and customizable manufacturing process to produce Parylene C micro-bellows. An optimization of the crucial design parameters is performed using finite element modeling from which designs with high deflection and low stress were obtained. Different micro-bellows designs are fabricated and characterized. The total volume of the fabricated models ranges from 3 to 0.3 mm3 and the minimum feature size is 60 μ m. The achieved cumulative deflection ranges from 300 to 570 μ m.

Original languageEnglish (US)
Pages (from-to)472-478
Number of pages7
JournalJournal of Microelectromechanical Systems
Issue number3
StatePublished - Jun 2018

Bibliographical note

Publisher Copyright:
© 1992-2012 IEEE.


  • 3D printing
  • Parylene C
  • micro device
  • micro-bellows membrane
  • microfabrication
  • miniaturization

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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