Engineering
Resonator
100%
Finite Element Simulation
77%
Q Factor
77%
Demonstrates
52%
Resonance Frequency
50%
Multimode
44%
Experimental Result
38%
Portal Frame
33%
Micro-Electro-Mechanical System
33%
Bistables
33%
Multiuser
33%
Using Sensor
33%
Magnetic Field
33%
Proof Mass
33%
Initial Position
33%
Pulse Duration
33%
Single Plane
33%
Test System
33%
Device Performance
33%
Crosstalk
33%
Single High
33%
Actuation
27%
Experimental Measurement
27%
Electrostatics
22%
Gas Sensor
16%
Bonding Wire
16%
Axial Loading
16%
Applied Voltage
16%
Finite Element Method
16%
Elevated Temperature
16%
Network Analyzer
16%
Directional
16%
Moving Part
16%
Geometric Nonlinearity
11%
Frequency Response Curve
11%
Good Agreement
11%
Softening Behavior
11%
Application Monitoring
11%
Antisymmetric Mode
11%
Sensing Device
11%
Resonant Frequency
11%
Single Device
11%
Magnetic Sensor
11%
Layer Structure
11%
Series Resonance
11%
Radio Frequency
11%
Thermal Conductivity
11%
Review Paper
11%
Quality Factor
11%
Performance Parameter
11%
Keyphrases
SOIMUMPs
33%
Integrated Inductor
33%
MEMS Inertial Switch
33%
2:1 Internal Resonance
33%
Portal Frame
33%
Microring Resonator
33%
Internal Resonance
33%
Gas Sensing
33%
Bidirectional Actuator
16%
Negative Stiffness
16%
Stiffness Behavior
16%
Binary Sensor
16%
Shock System
16%
Sensitive Direction
16%
Vibration Mode
16%
Gas Detection
16%
First Mode
16%
Mode Coupling
16%
Saturation Phenomenon
16%
Viscosity
16%
Yield Mode
16%
MEMS Devices
16%
Finite Element Model
16%
Electrostatic Loading
16%
Second Mode
16%
Frame Design
16%
Micromachining
16%
Geometric Nonlinearity
16%
Natural Resonance Frequency
11%
Series Harmonic Resonance
11%
SOI Wafer
11%
Structure Layer
11%
Planar Design
11%