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  • 2007

    65NM yield detractor caused by M1 filament shorts and solution

    Ee, Y. C., Tan, S. K., Chee, C. S., Tan, J. B., Zhang, B. C., Siew, Y. K., Tan, P. K., Zhang, F., Lai, K. H., Chettiar, M. S., Wang, X., Fu, T., Hsia, L. C., Inani, A., Akiya, N., Yuan, L. & Agarwal, A., Dec 1 2007, p. 117-122. 6 p.

    Research output: Contribution to conferencePaperpeer-review