JEOL E-beam Lithography system

  • Gheorghe Iordache (Manager)

Equipment/facility: Equipment

  • LocationShow on map

    King Abdullah University of Science and Technology Thuwal 23955

    Saudi Arabia

Equipments Details

Description

100 kV e-beam lithography
Model: JBX-6300FS

Details

NameJEOL E-beam Lithography system
ManufacturersJEOL Ltd.
Photo associated with equipment - e_beam_lithography_system.jpg