EE 305 Advanced MEMS Devices and Technology



Transduction techniques, including piezoelectric, electrothermal and resonant techniques. Chemical, gas and biological sensors; microfluidic and biomedical devices. Micromachining technologies such as laser machining and microdrilling, EDM, materials such as SiC and diamond. Sensor and actuator analysis and design through CAD.
Course period02/13/10 → …
Course level300