EE 204 Integrated Microsystems Laboratory



Development of a complete integrated microsystem, from functional definition to final test. MEMS-based transducer design and electrical, mechanical and thermal limits. Design of MOS interface circuits. MEMS and MOS chip fabrication. Mask making, pattern transfer, oxidation, ion implantation and metallization. Packaging and testing challenges. Students work in interdisciplinary teams.
Course period02/13/10 → …
Course level200